Corpus ID: 119508047

Pulsed-laser beam profiling for deposition of high-T_c YBCO films

@article{Pechen1999PulsedlaserBP,
  title={Pulsed-laser beam profiling for deposition of high-T_c YBCO films},
  author={E. Pechen},
  journal={arXiv: Superconductivity},
  year={1999}
}
  • E. Pechen
  • Published 1999
  • Physics
  • arXiv: Superconductivity
  • A special shaping of YAG:Nd^{3+} laser beam profile has been found to improve homogeneity and T_c of YBa_2Cu_3O_{7-\delta} films being deposited by the pulsed laser. Targets of a considerably non-stoichiometric composition and substrates of slanting cuts have turned to be necessary for the high-quality film growing. Multiple droplets and solid particles ejected from the target surface by the infrared radiation are removed successfuly from the laser-induced plasma by use of a velocity filter.