Pull-in time dynamics as a measure of absolute pressure

@inproceedings{Gupta1997PullinTD,
  title={Pull-in time dynamics as a measure of absolute pressure},
  author={Raj K. Gupta and Stephen D. Senturia},
  year={1997}
}
The squeezed-film damping component of the pull-in time of an electrostatically-actuated micromechanical fixed-fixed beam is shown to be a sensitive, and nearly linear function of ambient air pressure in the measured range of 0.1 mbar to 1013 mbar (1 atm or 760 Torr). Pull-in time simulations, based on a one-dimensional macromodel using a damping constant proportional to pressure, are in good agreement with measured data. The data and simulations show that pull-in type devices will make… CONTINUE READING

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