Pull-in Dynamics of Electrostatically-actuated Beams

  title={Pull-in Dynamics of Electrostatically-actuated Beams},
  author={Raj K. Gupta and Elmer S. Hung and Yao-Joe Yang and G. K. Ananthasuresh and Stephen D. Senturia},
We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensional finitedifference model, based on the compressible isothermal ReynoldÕs equation, are used to… CONTINUE READING
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