Pull-in Dynamics of Electrostatically-actuated Beams

@inproceedings{Gupta1997PullinDO,
  title={Pull-in Dynamics of Electrostatically-actuated Beams},
  author={Raj K. Gupta and Elmer S. Hung and Yao-Joe Yang and G. K. Ananthasuresh and Stephen D. Senturia},
  year={1997}
}
We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensional finitedifference model, based on the compressible isothermal ReynoldÕs equation, are used to… CONTINUE READING
Highly Cited
This paper has 22 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 15 extracted citations

References

Publications referenced by this paper.
Showing 1-5 of 5 references

Senturia, Solid-State Sensor and Actuator

S.D.Y. Yang
1996
View 2 Excerpts

J

T. Veijola, H. Kuisma
LahdenperŠ, and T. RyhŠnen, Sensors and Actuators A, 48 • 1995
View 1 Excerpt

ASME: Application o f Microfabrication to Fluid Mechanics, FED-Vol

E. B. Arkilic, et.al
1994

on Electron Devices

K. E. Petersen, IEEE Trans
ED-25 • 1978
View 1 Excerpt

ÒIsothermal Squeeze FilmsÓ

W. E. Langlois
Quarterly Applied Mathematics, XX, No. 2 • 1962
View 1 Excerpt

Similar Papers

Loading similar papers…