Proton Radiation Effects on MEMS Silicon Strain Gauges

@article{Marinaro2008ProtonRE,
  title={Proton Radiation Effects on MEMS Silicon Strain Gauges},
  author={D. G. Marinaro and Phillip J. McMahon and Alan Richard Wilson},
  journal={IEEE Transactions on Nuclear Science},
  year={2008},
  volume={55},
  pages={1714-1718}
}
A microelectromechanical system (MEMS) strain gauge constructed from single-crystalline silicon has been developed for application in aircraft structural-health-monitoring. The effects of proton irradiation on the piezoresistive elements of the silicon strain gauges are examined. Degradation in the piezoresistive response at applied strains above 2000 microstrain is observed. 

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