Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater

@article{Kimura2007ProposalOA,
  title={Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater},
  author={M. Kimura and Fumitoshi Sakurai and Hirao Ohta and T. Terada},
  journal={Microelectron. J.},
  year={2007},
  volume={38},
  pages={171-176}
}
New structural Pirani gauge-type thermal vacuum sensor with a microheater and two pn junction diodes, Th-A and Th-B, as a high-sensitive temperature sensor working like a thermistor formed on a micro-air-bridge (MAB) is proposed. The MAB is separated into two regions of A and B. The Th-A and the Th-B can measure temperatures of the region A and the region B connected to the region A with thermal resistance, respectively. The microheater is formed in the region A and can maintain its temperature… Expand
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