Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma

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@inproceedings{Kaneko2013PropertiesOE, title={Properties of epitaxial AlN thin film deposited on sapphire substrate by ECR plasma}, author={Satoru Kaneko and Takeshi Ito and Manabu Yasui and Masahito Kurouchi and Hironori Torii and Takao Amazawa and Takashi Tikumasu and Takatoshi Nagano and Lee Seughwan and Sungkyun Park and Hirofumi Takikawa}, booktitle={ICAIT}, year={2013} }