Properties of broadband depth-graded multilayer mirrors for EUV optical systems.

@article{Yakshin2010PropertiesOB,
  title={Properties of broadband depth-graded multilayer mirrors for EUV optical systems.},
  author={A. Yakshin and I. Kozhevnikov and E. Zoethout and E. Louis and F. Bijkerk},
  journal={Optics express},
  year={2010},
  volume={18 7},
  pages={
          6957-71
        }
}
The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial… Expand
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References

SHOWING 1-10 OF 38 REFERENCES
Spectral reflectance tuning of EUV mirrors for metrology applications
  • 10
Design and fabrication of broadband EUV multilayer mirrors
  • 16
Optimization of depth-graded multilayer designs for EUV and x-ray optics
  • 5
Design and fabrication of depth-graded X-ray multilayers
  • 48
Uniform and graded multilayers as x-ray optical elements.
  • P. Lee
  • Physics, Medicine
  • Applied optics
  • 1983
  • 24
Multilayer supermirrors: broadband reflection coatings for the 15- to 100-keV range
  • 3
Design of X-ray supermirrors
  • 83
  • PDF
Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry
  • 46
Design of grazing-incidence multilayer supermirrors for hard-x-ray reflectors.
  • 100
Numerical and experimental study of disordered multilayers for broadband x-ray reflection.
  • 26
...
1
2
3
4
...