Properties of broadband depth-graded multilayer mirrors for EUV optical systems.

@article{Yakshin2010PropertiesOB,
  title={Properties of broadband depth-graded multilayer mirrors for EUV optical systems.},
  author={Andrey E. Yakshin and Igor V. Kozhevnikov and Erwin Zoethout and Eric Louis and Fred Bijkerk},
  journal={Optics express},
  year={2010},
  volume={18 7},
  pages={
          6957-71
        }
}
The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial… 
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Background Citations
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27 Citations

Wavelength selection for multilayer coatings for the lithography generation beyond EUVL
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This work develops designs of wideband multilayers with strongly reduced layer thickness variations in depth, without essential degradation of their optical characteristics.
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Three broadband aperiodic Sb/B4C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in the wavelength range beyond the L-edge of Si (λ < 124 Å), and their…
Design and Fabrication of Broadband Mo/Si Multilayer Films for Extreme Ultra Violet Lithography Illumination System
To meet the wide angular bandpass requirement of a small-size mirror in extreme ultra violet (EUV) lithography illumination system, the designed broadband molybdenum (Mo) /silicon (Si) multilayer…
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In the development of high energy laser (HEL) beam diagnostic equipment with optical attenuation by dielectric multilayer films reflector, in order to fulfill the sampling uncertainty request of the…
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