Properties of broadband depth-graded multilayer mirrors for EUV optical systems.
@article{Yakshin2010PropertiesOB, title={Properties of broadband depth-graded multilayer mirrors for EUV optical systems.}, author={A. Yakshin and I. Kozhevnikov and E. Zoethout and E. Louis and F. Bijkerk}, journal={Optics express}, year={2010}, volume={18 7}, pages={ 6957-71 } }
The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial… Expand
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