Properties of broadband depth-graded multilayer mirrors for EUV optical systems.

  title={Properties of broadband depth-graded multilayer mirrors for EUV optical systems.},
  author={Andrey E. Yakshin and Igor V. Kozhevnikov and Erwin Zoethout and Eric Louis and Fred Bijkerk},
  journal={Optics express},
  volume={18 7},
The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial… 
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  • P. Lee
  • Physics
    Applied optics
  • 1983
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