Properties of DLC films deposited by the pulsed are ion source

Abstract

The pulsed vacuum arc ion deposition is a new technology that is paid great attentions by the experts internal and external recently. It has many special advantages that are different from other deposition methods. Diamond-like carbon (DLC) films are new films that its hardness is high, its resistance ration is high, its fiction coefficient is small, and it… (More)

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