Profiling and modeling of dc nitrogen microplasmas

@inproceedings{Wilsona2003ProfilingAM,
  title={Profiling and modeling of dc nitrogen microplasmas},
  author={Chester G. Wilsona and Yogesh B. Gianchandani and Robert Arslanbekov and Vladimir Kolobov and Amy Wendt},
  year={2003}
}
This article explores electric current and field distributions in dc microplasmas, which have distinctive characteristics that are not evident at larger dimensions. These microplasmas, which are powered by coplanar thin-film metal electrodes with 400mm minimum separations on a glass substrate, are potentially useful for microsystems in both sensing and microfabrication contexts. Experiments in N2 ambient show that electron current favors electrode separations of 4 mm at 1.2 Torr, reducing to 0… CONTINUE READING
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