Profiler design with multi-sensor data fusion methods

Abstract

This research integrated a balance with stylus probe, force actuator, LVDT (linear variable differential transformer), load cell, personal computer, and XYZ-stages into a contact force-controlled Scanning Probe Microscope (SPM) system, such that the surface of the sample would not be destroyed by the contact force produced by the stylus probe. By using PI… (More)

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