Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror -method for Enlarging Measuring Range of Autocollimator-

Abstract

Interferometers are widely used for measuring large reflecting flat surfaces and spherical surfaces because of its high accuracy and high efficiency. Because interferometry needs standard reference surface for measurement, when measuring a large aspheric surface it needs null lens or hologram to make an aspheric wave front. However, if the perfect profile… (More)

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