Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

  title={Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics},
  author={E. Backer and W. Ehrfeld and D. M{\"u}nchmeyer and H. Betz and A. Heuberger and S. Pongratz and W. Glashauser and H. Michel and R. Siemens},
X-ray lithography using synchrotron radiation has been applied in a multi-step process for the production of plastic moulds to be used in the fabrication of separation nozzles by electrodeposition. [...] Key Result For characteristic dimensions of a few microns a total height of the nozzle structure of about 400 μm has been achieved. Structural details of about 0.1 μm are being reproduced across the total thickness of the polymer layer.Expand

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