Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers

@inproceedings{Murata2003ProductionO8,
  title={Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers},
  author={Kazutoshi Murata and Naoki Fujioka and Yoshiharu Chinone and Shigehiro Nishino},
  year={2003}
}