Corpus ID: 40158748

Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems

@inproceedings{Wang2006ProcessingAC,
  title={Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems},
  author={Weiqiang Wang},
  year={2006}
}
The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed. 

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References

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Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routesExpand
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