• Corpus ID: 40158748

Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems

@inproceedings{Wang2006ProcessingAC,
  title={Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems},
  author={Weiqiang Wang},
  year={2006}
}
The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed. 

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References

SHOWING 1-6 OF 6 REFERENCES

PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS

Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes

Lead-zirconate-titanate-based piezoelectric micromachined switch

A piezoelectric microelectromechanical switch actuated by lead zirconate titanate (PZT) is reported. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer and released

Fabrication of Lead Zirconate Titanate Microrods for 1–3 Piezocomposites Using Hot Isostatic Pressing with Silicon Molds

A new lost-mold process to fabricate piezoceramic microrods for 1–3 piezocomposites has been developed. A Si wafer was machined as a mold with a regular array of columnar cavities having a negative

Materials issues in microelectromechanical systems (MEMS)