Process-sensitive Monitor Circuits for Estimation of Die-to-Die Process Variability

  title={Process-sensitive Monitor Circuits for Estimation of Die-to-Die Process Variability},
  author={Islam A. K. M. Mahfuzul and Akira Tsuchiya and Kensuke Kobayashi and Hidetoshi Onodera},
In this paper, we propose a set of ring oscillators (ROs) to estimate D2D variation of MOS threshold voltage and gate length. First, we show a design guideline on designing ROs with enhanced process sensitivities. We propose a set of ROs for process parameter estimation. We then develop an estimation method using a linear model to extract the variations from the measured frequencies. Simulation results confirm that our proposed circuits are able to extract process parameters in the conditions… CONTINUE READING
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