Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)

@inproceedings{Montfort2007ProcessEA,
  title={Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)},
  author={F. Montfort and Y. Emery and F. Marquet and E. Cuche and Nicolas Aspert and E. Solanas and A. Mehdaoui and A. Ionescu and C. Depeursinge},
  booktitle={SPIE MOEMS-MEMS},
  year={2007}
}
  • F. Montfort, Y. Emery, +6 authors C. Depeursinge
  • Published in SPIE MOEMS-MEMS 2007
  • Engineering
  • Process engineering and failure analysis of MEMS and MOEMS require static and dynamical characterization of both their in-plane and out of plane response to an excitation. A remarkable characteristic of Digital Holography Microscopes (DHM) is the extremely short acquisition time required to grab the whole information necessary to provide 3D optical topography of the sample: a unique frame grab, without any vertical or lateral scan provides the information over the full field of view. First, it… CONTINUE READING
    Real-time dual-wavelength digital holographic microscopy for MEMS characterization
    • 4

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