Process Stabilization and Sensitivity Analyses of a Single Recess GaAs pHEMT Process using Device Simulations

Cite this paper

@article{Abele2008ProcessSA, title={Process Stabilization and Sensitivity Analyses of a Single Recess GaAs pHEMT Process using Device Simulations}, author={Petra Abele and Michele Schafer and Jo{\~a}o Carlos Splettstosser and M. Thinnes and Hermann Stieglauer and D. Behammer}, journal={2008 European Microwave Integrated Circuit Conference}, year={2008}, pages={56-59} }