Printed indium gallium zinc oxide transistors. Self-assembled nanodielectric effects on low-temperature combustion growth and carrier mobility.
@article{Everaerts2013PrintedIG,
title={Printed indium gallium zinc oxide transistors. Self-assembled nanodielectric effects on low-temperature combustion growth and carrier mobility.},
author={Ken Everaerts and Li Zeng and Jonathan W. Hennek and Diana I Camacho and Deep Jariwala and Michael J. Bedzyk and Mark C. Hersam and Tobin J. Marks},
journal={ACS applied materials \& interfaces},
year={2013},
volume={5 22},
pages={
11884-93
}
}Solution-processed amorphous oxide semiconductors (AOSs) are emerging as important electronic materials for displays and transparent electronics. We report here on the fabrication, microstructure, and performance characteristics of inkjet-printed, low-temperature combustion-processed, amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) grown on solution-processed hafnia self-assembled nanodielectrics (Hf-SANDs). TFT performance for devices processed below 300 °C includes…
Figures and Tables from this paper
61 Citations
Hole mobility modulation of solution-processed nickel oxide thin-film transistor based on high-k dielectric
- Materials Science
- 2016
Solution-processed p-type oxide semiconductors have recently attracted increasing interests for the applications in low-cost optoelectronic devices and low-power consumption complementary…
High-Performance Inkjet-Printed Indium-Gallium-Zinc-Oxide Transistors Enabled by Embedded, Chemically Stable Graphene Electrodes.
- Materials ScienceACS applied materials & interfaces
- 2016
The suitability of inkjet-printed graphene electrodes for IGZO thin-film transistor channels with compatible source/drain electrodes using low-temperature, solution-phase patterning methods is demonstrated, offering a promising platform for future printed electronics applications.
Performance improvement for printed indium gallium zinc oxide thin-film transistors with a preheating process
- Materials Science
- 2016
High performance indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) were fabricated by printing and spin-coating IGZO inks as a semiconductor layer at low temperature annealing. A…
High-Performance All-Printed Amorphous Oxide FETs and Logics with Electronically Compatible Electrode/Channel Interface.
- Materials ScienceACS applied materials & interfaces
- 2018
A protocol for designing the most electronically compatible electrode/channel interface based on the judicious material selection is developed, resulting in the formation of In-Sn-Zn-O (ITZO)-based-diffused a-IGZO-ITO interface that controls doping density while ensuring high electrical performance.
Self-Assembled Nanodielectrics for High-Speed, Low-Voltage Solution-Processed Polymer Logic Circuits
- Physics
- 2015
Solution-processed polymer-based logic circuits are typically associated with high operating voltage and slow switching speeds. Here, polymer field-effect transistors (PFETs) fabricated on hybrid…
Solution-Processed Self-Assembled Nanodielectrics on Template-Stripped Metal Substrates.
- Materials ScienceACS applied materials & interfaces
- 2015
This report demonstrates the growth of solution-processed zirconia self-assembled nanodielectrics (Zr-SAND) on template-stripped aluminum substrates and results are important to conduct detailed transport measurements in emergent transistor technologies featuring SAND as well as for future applications in integrated circuits or flexible electronics.
Amorphous In-Ga-Zn-O thin-film transistors fabricated by microcontact printing
- Materials Science
- 2015
The authors present a facile, low-cost methodology to fabricate high-performance In-Ga-Zn-O (IGZO) bottom contact, bottom gate thin-film transistors (TFTs) by soft lithography. The IGZO channel and…
Chitosan-gated low-voltage transparent indium-free aluminum-doped zinc oxide thin-film transistors
- Materials Science
- 2016
Spray-combustion synthesis: Efficient solution route to high-performance oxide transistors
- Materials ScienceProceedings of the National Academy of Sciences
- 2015
A low-temperature, thickness-controlled coating process to create high-performance, solution-processed MO electronics: spray-combustion synthesis (SCS), and for the first time, indium-gallium-zinc-oxide (IGZO) transistors having densification, nanoporosity, electron mobility, trap densities, bias stability, and film transport approaching those of sputtered films and compatible with conventional fabrication (FAB) operations are reported.
High Performance Amorphous IGZO Thin-Film Transistor Based on Alumina Ceramic
- Materials ScienceIEEE Access
- 2019
The fabrication of TFT-based inverters, NAND and NOR gate circuits facilitate the exploration of the possibility of more complex digital circuits that operate at high temperatures, based on hybrid circuit design.
References
SHOWING 1-10 OF 152 REFERENCES
Reduced contact resistance in inkjet printed high-performance amorphous indium gallium zinc oxide transistors.
- Materials ScienceACS applied materials & interfaces
- 2012
An optimized "ink" and printing process for inkjet patterning of amorphous indium gallium zinc oxide (a-IGZO) TFTs is demonstrated and the effects of device structure on derived electron mobility are investigated.
High-performance solution-processed amorphous zinc-indium-tin oxide thin-film transistors.
- Materials ScienceJournal of the American Chemical Society
- 2010
It is shown that structural relaxation and densification by In(3+) and Sn(4+) mixing is effective in reducing carrier trap sites and in creating carrier-generating oxygen vacancies.
Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping*
- Materials ScienceJournal of Display Technology
- 2009
The origins of the prominent features of AOS devices from the viewpoint of materials science of A OS indicate that electron transport in oxide semiconductors are insensitive to random structures and these oxides do not form high-density defects that affect electron transport and TFT operation.
Solution-deposited organic-inorganic hybrid multilayer gate dielectrics. Design, synthesis, microstructures, and electrical properties with thin-film transistors.
- Materials ScienceJournal of the American Chemical Society
- 2011
The TFT performance parameters of representative organic semiconductors deposited on Zr-SAND films, functionalized on the surface with various alkylphosphonic acid self-assembled monolayers, are investigated and shown to correlate closely with the alkyLphosphonics acid chain dimensions.
Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’ process.
- Materials ScienceNature materials
- 2011
The formation of amorphous metal oxide semiconducting thin-films using a ‘sol–gel on chip’ hydrolysis approach from soluble metal alkoxide precursors affords unprecedented high field-effect mobilities, reproducible and stable turn-on voltages Von≈0 V and high operational stability at maximum process temperatures as low as 230 °C.
Flexible low-voltage organic thin-film transistors enabled by low-temperature, ambient solution-processable inorganic/organic hybrid gate dielectrics.
- Materials ScienceJournal of the American Chemical Society
- 2010
The morphologies and microstructures of representative semiconductor films grown on CHB dielectrics prepared with incrementally varied compositions and processing conditions are investigated and shown to correlate closely with the OTFT response.
High-performance transparent inorganic–organic hybrid thin-film n-type transistors
- Materials ScienceNature materials
- 2006
Transparent inorganic–organic hybrid n-type TFTs fabricated at room temperature by combining In2O3 thin films grown by ion-assisted deposition, with nanoscale organic dielectrics self-assembled in a solution-phase process are reported, suggesting new strategies for achieving ‘invisible’ optoelectronics.
Effect of surface roughness on electrical characteristics in amorphous InGaZnO thin-film transistors with high-κ Sm2O3 dielectrics
- Materials Science, Engineering
- 2013
Thin-film transistors with transparent amorphous zinc indium tin oxide channel layer
- Materials Science
- 2007
Thin-film transistors (TFTs) with transparent amorphous zinc indium tin oxide (ZITO) channel layer are demonstrated. Optical transmission of the channel layer is approximately 85% in the visible…
Amorphous InGaZnO thin film transistors with SiO2/HfO2 double-layer gate dielectric fabricated at low temperature
- Engineering, Materials Science
- 2012








