Principle and simulation of correlation steered scanning for SPM to overcome thermal drift


A new scanning strategy named correlation steered scanning for Scanning Probe Microscopy (SPM) is proposed in this paper. Different from the traditional raster scanning, this method adopts scanning band by band. A narrow band of the sample is scanned at first, and then a band with a partial overlap to the first one is scanned reversely. Each band is… (More)


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