Principle and simulation of correlation steered scanning for SPM to overcome thermal drift

Abstract

A new scanning strategy named correlation steered scanning for Scanning Probe Microscopy (SPM) is proposed in this paper. Different from the traditional raster scanning, this method adopts scanning band by band. A narrow band of the sample is scanned at first, and then a band with a partial overlap to the first one is scanned reversely. Each band is… (More)

Topics

8 Figures and Tables

Slides referencing similar topics