Preparation of Ni current collector and MoS<inf>2</inf> cathode in three-dimensional Li ion microbattery based on silicon MCP


Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a… (More)


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