Preparation method for cerium oxide crystal and application thereof in chemical mechanical polishing (CMP)

@inproceedings{2014PreparationMF,
  title={Preparation method for cerium oxide crystal and application thereof in chemical mechanical polishing (CMP)},
  author={尹先升 and 贾长征 and 房庆华 and 周仁杰 and 王雨春},
  year={2014}
}
The invention aims to provide a preparation method for a cerium oxide crystal. The method comprises the following steps: preparing cerium carbonate through a two-step precipitation process, and subjecting obtained cerium carbonate to high-temperature calcination so as to obtain cerium oxide. The prepared cerium oxide particles have uniform particle size, and are easily dispersed in a liquid phase through mechanical force; and a chemical mechanical polishing (CMP) liquid with the dispersed… CONTINUE READING