Preparation and Characterization of Thin Film Li4Ti5O12 Electrodes by Magnetron Sputtering

@inproceedings{Wang2005PreparationAC,
  title={Preparation and Characterization of Thin Film Li4Ti5O12 Electrodes by Magnetron Sputtering},
  author={C.-L. Wang and Yi-Ying Liao and F. C. Hsu and Nyan-Hwa Tai and Maw-Kuen Wu},
  year={2005}
}
This paper reports that spinel-phase Li 4 Ti 5 O 1 2 thin films were successfully grown by radio frequency (rf) magnetron sputtering on an Au/Ti/SiO 2 /Si substrate. In this process, the buffer layer of gold serves as a template for the texture growth of Li 4 Ti 5 O 1 2 film. The growth temperature affects the microstructure and electrochemical characteristics of the deposited films. In our study, the spinel phase of Li 4 Ti 5 O 1 2 appears at deposition temperatures above 500°C. The redox… CONTINUE READING

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