Preliminary Study of Resonant Mass Sensors Based on Asymmetrically Gapped Cantilevers

Abstract

This paper reports the proof of concept of resonant mass sensors based on asymmetrically gapped cantilevers using a mesoscale prototype. The asymmetrically gapped cantilever structure helps to increase the displacement sensitivity signifi cantly and consequently increases the mass resolution. The body of the mesoscale prototype was machined from an aluminum… (More)

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