Prediction and compensation of motion accuracy in a linear motion bearing table

@inproceedings{Khim2011PredictionAC,
  title={Prediction and compensation of motion accuracy in a linear motion bearing table},
  author={Gyungho Khim and Chun Hong Park and Eiji Shamoto and Seung-Woo Kim},
  year={2011}
}
Abstract In the present research, a corrective machining algorithm is introduced to improve the motion accuracy of linear motion bearing tables. The algorithm commences with reverse analysis, in which the rail form error is estimated from the measured linear and angular motion errors. In the next step, the rail is remachined to reduce the estimated form error. Then, the motion errors are measured again, and the procedure is repeated until the measured errors are sufficiently small. A transfer… CONTINUE READING

Similar Papers