Predictable Three-Dimensional Microfluidic Channel Fabrication in a Single-Mask Process

@article{Gantz2007PredictableTM,
  title={Predictable Three-Dimensional Microfluidic Channel Fabrication in a Single-Mask Process},
  author={Kevin F. Gantz and Masoud Agah},
  journal={TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2007},
  pages={755-758}
}
This paper presents the results of an investigation into the effect of geometrical patterns of the photomask on the dimensions of the trench that evolves after silicon isotropic etching. The study is based on the most complex surface pattern to date, composed of five independent geometric variables. Data from over 180 different patterns was collected to… CONTINUE READING