Precision topographic inspection of MOEMS by moiré interferometry

  title={Precision topographic inspection of MOEMS by moir{\'e} interferometry},
  author={Said Meguellati},
  booktitle={SPIE Photonics Europe},
  • Said Meguellati
  • Published in SPIE Photonics Europe 2016
  • Physics, Engineering
  • The manufacturing of micro components is useful and necessary for eventual use in the field of MOEMS micro technologies, but, micro fabrication process inspection quality is required. The accuracy of components geometry is parameter which influences the precision of the function. Moiré topography is full-field optical technique in which the contour and shape of object surfaces is measured by means of geometric interference between two identical line gratings. The technique has found various… CONTINUE READING

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