Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

  title={Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization},
  author={V'it Kancl'ivr and Jan V'aclav'ik and Karel vZ'idek},
  journal={Acta Physica Polonica A},
Layers with gradient refractive-index profile are an attractive alternative to conventional homogeneous stack coatings. However, the optical characterization and monitoring of the graded refractive-index profile is a complex issue, which has been typically solved by using a simplified model of mixed materials. Although this approach provides a solution to the problem, the precision, which can be expected from optical characterization of the refractive index gradient, remains unclear. In this… 
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