Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization
@article{Kanclivr2020PrecisionOS, title={Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization}, author={V'it Kancl'ivr and Jan V'aclav'ik and Karel vZ'idek}, journal={Acta Physica Polonica A}, year={2020} }
Layers with gradient refractive-index profile are an attractive alternative to conventional homogeneous stack coatings. However, the optical characterization and monitoring of the graded refractive-index profile is a complex issue, which has been typically solved by using a simplified model of mixed materials. Although this approach provides a solution to the problem, the precision, which can be expected from optical characterization of the refractive index gradient, remains unclear. In this…
One Citation
Optically enhanced second harmonic generation in silicon oxynitride thin films via local layer heating
- Physics
- 2022
Strong second harmonic generation (SHG) in silicon nitride has been extensively studied — among others, in terms of laser-induced SHG enhancement in Si 3 N 4 waveguides. This enhancement has been…
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