Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

@inproceedings{Park2005PrecisionCN,
  title={Precision carbon nanotube tip for critical dimension measurement with atomic force microscope},
  author={Byong Chon Park and Kap Yong Jung and Jin-kyu Hong and Won young Song and O B.H. and J. A. Kim},
  booktitle={SPIE Advanced Lithography},
  year={2005}
}
Precision carbon nanotube (P-CNT) tip for atomic force microscope (AFM) was fabricated where CNT orientation and length is controlled within the precision of 1 degree and 300 nm, respectively. The orientation, diameter and length of CNT tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, P-CNT tip could be made. P-CNT tip acts as a normal CNT tip without FIB… CONTINUE READING

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