Precision Positioning down to Single Nanometres Based on Micro Harmonic Drive Systems

Abstract

At present the Micro Harmonic Drive is the world’s smallest backlash-free micro gear. Its favourable properties like high repeatability, high torque capacity, low mass of inertia and high degree of efficiency are proved applied in different applications for semiconductor manufacturing, measuring machines, aerospace and other industries. However for high… (More)
DOI: 10.1007/978-0-387-77405-3_25

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