Precisely-controlled fabrication of single ZnO nanoemitter arrays and their possible application in low energy parallel electron beam exposure.

@article{He2012PreciselycontrolledFO,
  title={Precisely-controlled fabrication of single ZnO nanoemitter arrays and their possible application in low energy parallel electron beam exposure.},
  author={Hexiang He and Jun Cong She and Yuan Feng Huang and Shao Zhi Deng and N. S. Xu},
  journal={Nanoscale},
  year={2012},
  volume={4 6},
  pages={
          2101-8
        }
}
Precisely-controlled fabrication of single ZnO nanoemitter arrays and their possible application in low energy parallel electron beam exposure are reported. A well defined polymethyl methacrylate (PMMA) nanohole template was employed for local solution-phase growth of single ZnO nanoemitter arrays. Chlorine plasma etching for surface smoothing and pulsed-laser illumination in nitrogen for nitrogen doping were performed, which can significantly enhance the electron emission and improve the… CONTINUE READING

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