Power handling capability of High-Q evanescent-mode RF MEMS resonators with flexible diaphragm

Abstract

In this paper, we present theoretical and experimental investigations into the power handling capability of high-Q evanescent-mode RF MEMS tunable resonators based on electrostatically-actuated thin diaphragm tuner. The “self-biasing” of the diaphragm tuner from RF signal has been found to cause non-linear effects such as resonant frequency… (More)

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@article{Liu2009PowerHC, title={Power handling capability of High-Q evanescent-mode RF MEMS resonators with flexible diaphragm}, author={Xiaoguang Liu and Linda P. B. Katehi and William J. Chappell and Dimitrios Peroulis}, journal={2009 Asia Pacific Microwave Conference}, year={2009}, pages={194-197} }