Potential sputtering of lithium fluoride by slow multicharged ions.

@article{Neidhart1995PotentialSO,
  title={Potential sputtering of lithium fluoride by slow multicharged ions.},
  author={Neidhart and Pichler and Aumayr and Winter and Schmid and Varga},
  journal={Physical review letters},
  year={1995},
  volume={74 26},
  pages={
          5280-5283
        }
}
Thin polycrystalline LiF films have been bombarded by slow $(\ensuremath{\le}1$ keV) multicharged ${\mathrm{Ar}}^{q+}$ ions $(q\ensuremath{\le}9)$, in order to study the resulting total sputter yields by means of a quartz crystal microbalance. More than 99% of sputtered particles are neutral and show yields, at given impact energy, in proportion to the potential energy of projectile ions. The respective ``potential sputtering'' process already takes place far below 100 eV impact energy. It can… Expand
Potential sputtering
  • F. Aumayr, H. Winter
  • Medicine, Materials Science
  • Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences
  • 2003
Coulomb explosion sputtering of selectively oxidized Si.
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