Potential sputtering

  title={Potential sputtering},
  author={Friedrich Aumayr and Hannspeter Winter},
  journal={Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences},
  pages={102 - 77}
  • F. Aumayr, H. Winter
  • Published 2003
  • Physics
  • Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences
The potential energy stored in multiply charged ions is liberated when the ions recombine during impact on a solid surface. For certain target species this can lead to a novel form of ion–induced sputtering, which, in analogy to the usual kinetic sputtering, has been termed ‘potential sputtering’. This sputtering process is characterized by a strong dependence of the observed sputtering yields on the charge state of the impinging ion and can take place at ion–impact energies well below the… 

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