Postdeposition treatment of IBS coatings for UV applications with optimized thin-film stress properties.


Ion-beam-sputtering (IBS) single-layer and multilayer coating designs for UV applications were examined after the deposition process as well as after a defined postdeposition treatment. High internal compressive film stress as well as moderate absorption losses in the UV spectral range were measured at the as-deposited thin films. Due to a controlled… (More)
DOI: 10.1364/AO.53.00A212


15 Figures and Tables