Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors

@article{Olsson2007PostCMOSCA,
  title={Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors},
  author={Roy H. Olsson and John Christopher Fleming and Karol Wojciechowski and Mr. Baker and Melanie R. Tuck},
  journal={2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum},
  year={2007},
  pages={412-419}
}
This paper reports post-CMOS compatible aluminum nitride (AlN) MEMS resonators, filters, and resonant sensors for the miniaturization of radio-frequency transceivers and sensor systems. Utilizing a resonator with two closely spaced modes, 2nd order MEMS filters occupying 0.06 mm2 have been realized in a single device. Methods for tuning the bandwidth and center frequency of these filters lithographically have been demonstrated. A 0.5% bandwidth, 108.4 MHz dual mode filter has a measured… CONTINUE READING

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