Positioning of self-assembled, single-crystal, germanium islands by silicon nanoimprinting


Strain energy from the lattice mismatch of a heteroepitaxial system can create ‘‘self-assembled,’’ single-crystal islands irregularly arranged on the surface. Alternatively, features of tens of nanometers can be patterned on a substrate by ‘‘nanoimprinting’’ using a mold and etching. When these two techniques are combined, the small patterned features can… (More)


3 Figures and Tables

Slides referencing similar topics