Positioning of self-assembled, single-crystal, germanium islands by silicon nanoimprinting

Abstract

Strain energy from the lattice mismatch of a heteroepitaxial system can create ‘‘self-assembled,’’ single-crystal islands irregularly arranged on the surface. Alternatively, features of tens of nanometers can be patterned on a substrate by ‘‘nanoimprinting’’ using a mold and etching. When these two techniques are combined, the small patterned features can… (More)

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