Polymer-based stress sensor with integrated readout

@inproceedings{Thaysen2002PolymerbasedSS,
  title={Polymer-based stress sensor with integrated readout},
  author={Jacob Thaysen and Arda D. Yalcinkaya and Peter Vettiger and Aric Kumaran Menon},
  year={2002}
}
We present a polymer-based mechanical sensor with an integrated strain sensor element. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in the sensor. By using the fact that the polymer SU-8 [1] is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8-based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive… CONTINUE READING

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