Polyimide-Planarized Vertical-Cavity Surface-Emitting Lasers With 17.0-GHz Bandwidth

Abstract

High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit 3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsulating substrates to achieve low capacitance.

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Cite this paper

@inproceedings{ALOmari2004PolyimidePlanarizedVS, title={Polyimide-Planarized Vertical-Cavity Surface-Emitting Lasers With 17.0-GHz Bandwidth}, author={Ahmad N. AL-Omari}, year={2004} }