Polydimethylsiloxane ( PDMS ) for High Aspect Ratio Three-dimensional MEMS

@inproceedings{Kim2001PolydimethylsiloxaneP,
  title={Polydimethylsiloxane ( PDMS ) for High Aspect Ratio Three-dimensional MEMS},
  author={Kabseog Kim and Sangwon Park and Harish Manohara and Jeong-Bong Lee},
  year={2001}
}
This paper presents methods of rapid prototyping of PDMS (polydimethylsiloxane) for creating polymer and metallic three-dimensional high aspect ratio microstructures (HARMs) for general MEMS applications. Massive replication of high precision PDMS HARMs has been demonstrated in non clean room environment. Surface roughness was measured both on the metallic… CONTINUE READING