Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication

Abstract

This manuscript is the first of a two-part series describing the fabrication and testing of MHz frequency, polycrystalline silicon-carbide (poly-SiC) micromechanical resonators made from films deposited by atmospheric-pressure chemical-vapor deposition (APCVD). In Part I, the development of deposition and patterning techniques suitable for the fabrication… (More)

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