Polycarbonate-based ordered arrays of electrochemical nanoelectrodes obtained by e-beam lithography.

@article{Moretto2011PolycarbonatebasedOA,
  title={Polycarbonate-based ordered arrays of electrochemical nanoelectrodes obtained by e-beam lithography.},
  author={Ligia M. Moretto and Massimo Tormen and Manuela De Leo and Alessandro Carpentiero and Paolo Ugo},
  journal={Nanotechnology},
  year={2011},
  volume={22 18},
  pages={185305}
}
Ordered arrays of nanoelectrodes for electrochemical use are prepared by electron beam lithography (EBL) using polycarbonate as a novel e-beam resist. The nanoelectrodes are fabricated by patterning arrays of holes in a thin film of polycarbonate spin-coated on a gold layer on Si/Si(3)N(4) substrate. Experimental parameters for the successful use of polycarbonate as high resolution EBL resist are optimized. The holes can be filled partially or completely by electrochemical deposition of gold… CONTINUE READING

Citations

Publications citing this paper.

Similar Papers

Loading similar papers…