Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters

@inproceedings{Shao2007PolyS,
  title={Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters},
  author={Pei Ge Shao and Jeroen Anton van Kan and Kambiz Ansari and Andrew A Bettiol and Fiona M. Watt},
  year={2007}
}
Abstract Proton beam writing (PBW) has been proven to be a powerful tool for fabricating micro and nanostructures with high aspect ratio. However, being a direct-write technique, and therefore, a serial process, PBW is not economic for low cost multiple component production. Techniques for replicating PBW structures with low cost are necessary for applications in for example nanofluidics, tissue engineering and optical devices. We have investigated casting poly (dimethyl siloxane) (PDMS Sylgard… CONTINUE READING
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