• Materials Science
  • Published 1999

Polishing grinding wheel and substrate polishing process with the help of the grinding wheel

@inproceedings{Hirokawa1999PolishingGW,
  title={Polishing grinding wheel and substrate polishing process with the help of the grinding wheel},
  author={Kazuto Hirokawa and Hirokuni Hiyama and Hisanori Matsuo and Yutaka Wada},
  year={1999}
}