Polarization inverted (0001) / (000-1) ScAIN film resonators operating in second overtone mode

Abstract

Polarization-inverted multilayered structure can excite high overtone mode resonance. Resonant frequency of high order mode resonator is higher than that of 1st mode resonator even though entire film thickness is same. The film thickness of high order mode resonator is thicker in same operating frequency. Therefore, high order mode resonator is expected to… (More)

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