Pneumatic microactuator powered by the deflagration of sodium azide

  title={Pneumatic microactuator powered by the deflagration of sodium azide},
  author={A. A. Norton and M. A. Minor},
  journal={Journal of Microelectromechanical Systems},
This paper details the design, simulation, fabrication, and characterization of two pneumatic microactuators powered by sodium azide or an external pressure source. One was fabricated using traditional manufacturing, while the other used microfabrication techniques. To characterize force output, a microforce gage was also designed, built, and characterized since commercial devices were not available. The azide-based microactuator was successfully actuated numerous times and simulations were… CONTINUE READING


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