Pmn-pt ( Lead Magnesium Niobate – Lead Titanate ) Piezoelectric Material Micromachining by Excimer La Ser Ablation and Dry Etching ( Drie )

@inproceedings{Ivan2013PmnptL,
  title={Pmn-pt ( Lead Magnesium Niobate – Lead Titanate ) Piezoelectric Material Micromachining by Excimer La Ser Ablation and Dry Etching ( Drie )},
  author={Ioan Ivan and Jo{\"e}l Agnus and Pierre Lambert},
  year={2013}
}
In the attempt to find the appropriate micromanufac turing technology of PMN-PT (lead magnesium niobate –lead titanate) piezo material, whose MEMS-related applic ations look promising, two methods are investigated : xcimer laser ablation (using KrF gas) and inductively coupled pl asma (ICP) dry etching, also known as DRIE (using A r/C4F8 gases). The paper… CONTINUE READING