Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor

@article{Blampain2013PlatinumAlNSapphireSR,
  title={Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor},
  author={Eloi Blampain and Omar Elmazria and Ouarda Legrani and Stefan Mc-Murtry and François Montaigne and Chuan Fu and Kyoung Kun Lee and Seungha Yang},
  journal={2013 IEEE International Ultrasonics Symposium (IUS)},
  year={2013},
  pages={1081-1084}
}
In this work, Pt/AlN/Sapphire SAW resonator operating in 2.45GHz ISM band is studied as a potential sensor for high temperature and high frequency applications. Experimental characterization was realized using a specific station probe between room temperature and 500°C. Results show that electromechanical factor of the structure (K2) increase with temperature, while the quality factor decreases. The variation of frequency with temperature shows a good linearity, which is very useful for… CONTINUE READING

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AlN/6H-SiC SAW resonator for high temperature wireless SAW sensor

  • 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
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