Plastic ratcheting induced cracks in thin ' lm structures

  title={Plastic ratcheting induced cracks in thin ' lm structures},
  author={M. Huanga and Z. Suoa and Q. Mab},
  • M. Huanga, Z. Suoa, Q. Mab
  • Published 2001
In the microelectronic and photonic industries, temperature cycling has long been used as a reliability test to qualify integrated materials structures of small feature sizes. The test is time consuming, and is a bottleneck for innovation. Tremendous needs exist to understand various failure modes in the integrated structures caused by cyclic temperatures. This paper presents a systematic study of a failure mechanism recently discovered by the authors. In a thin 'lm structure comprising both… CONTINUE READING
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