Plastic deformation of microstructures using carbon nanotubes film as latching surface

@article{Eun2011PlasticDO,
  title={Plastic deformation of microstructures using carbon nanotubes film as latching surface},
  author={Youngkee Eun and J. -I. Lee and J. -H. Choi and Yongnam Song and J H Kim},
  journal={2011 16th International Solid-State Sensors, Actuators and Microsystems Conference},
  year={2011},
  pages={1626-1629}
}
We have demonstrated a novel method utilizing carbon nanotube (CNT) arrays as latching surface for silicon plastic deformation applications where the high temperature process is required. The CNT arrays integrated on microstructures maintain the strained shapes of the microstructures in the high temperature environments. In order to demonstrate the proposed… CONTINUE READING