Plasma treating apparatus and electrode member therefor and electrode member manufacturing and recycling method

@inproceedings{2006PlasmaTA,
  title={Plasma treating apparatus and electrode member therefor and electrode member manufacturing and recycling method},
  author={岩井哲博},
  year={2006}
}
In a plasma treating apparatus for carrying out a plasma treatment by setting a plate-shaped work to be an object, an electrode member ( 46) to abut on a lower surface of the work is constituted by soldering a plate-shaped suction member (45) having a plurality of through holes ( 45a) formed thereon and a cooling plate (44) , and a sprayed film (65) obtained by spraying alumina is formed on an upper surface of the suction member (45) , and furthermore, an edge of a hole portion (45d) in which… CONTINUE READING